TY - JOUR A1 - Kämpken, Britta A1 - Wulf, Verena A1 - Auner, Norbert A1 - Winhold, Marcel A1 - Huth, Michael A1 - Rhinow, Daniel A1 - Terfort, Andreas T1 - Directed deposition of silicon nanowires using neopentasilane as precursor and gold as catalyst T2 - Beilstein journal of nanotechnology N2 - In this work the applicability of neopentasilane (Si(SiH3)4) as a precursor for the formation of silicon nanowires by using gold nanoparticles as a catalyst has been explored. The growth proceeds via the formation of liquid gold/silicon alloy droplets, which excrete the silicon nanowires upon continued decomposition of the precursor. This mechanism determines the diameter of the Si nanowires. Different sources for the gold nanoparticles have been tested: the spontaneous dewetting of gold films, thermally annealed gold films, deposition of preformed gold nanoparticles, and the use of “liquid bright gold”, a material historically used for the gilding of porcelain and glass. The latter does not only form gold nanoparticles when deposited as a thin film and thermally annealed, but can also be patterned by using UV irradiation, providing access to laterally structured layers of silicon nanowires. KW - chemical vapor deposition KW - gold KW - nanoparticle KW - patterning KW - radiation-induced nanostructures KW - vapor-liquid-solid mechanism Y1 - 2012 UR - http://publikationen.ub.uni-frankfurt.de/frontdoor/index/index/docId/26318 UR - https://nbn-resolving.org/urn:nbn:de:hebis:30:3-263182 SN - 2190-4286 VL - 3 SP - 535 EP - 545 PB - Beilstein-Institut zur Förderung der Chemischen Wissenschaften CY - Frankfurt, M. ER -