Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments
- The aim of the present overview article is to raise awareness of an essential aspect that is usually not accounted for in the modelling of electron transport for focused-electron-beam-induced deposition (FEBID) of nanostructures: Surface excitations are on the one hand responsible for a sizeable fraction of the intensity in reflection-electron-energy-loss spectra for primary electron energies of up to a few kiloelectronvolts and, on the other hand, they play a key role in the emission of secondary electrons from solids, regardless of the primary energy. In this overview work we present a general perspective of recent works on the subject of surface excitations and on low-energy electron transport, highlighting the most relevant aspects for the modelling of electron transport in FEBID simulations.
| Author: | Francesc Salvat-PujolORCiD, Roser ValentíORCiDGND, Wolfgang S. M. WernerORCiDGND |
|---|---|
| URN: | urn:nbn:de:hebis:30:3-824128 |
| DOI: | https://doi.org/10.3762/bjnano.6.129 |
| ISSN: | 2190-4286 |
| ArXiv Id: | http://arxiv.org/abs/1505.00938 |
| Parent Title (English): | Beilstein journal of nanotechnology |
| Publisher: | Beilstein-Institut zur Förderung der Chemischen Wissenschaften |
| Place of publication: | Frankfurt am Main |
| Document Type: | Article |
| Language: | English |
| Date of Publication (online): | 2015/06/03 |
| Date of first Publication: | 2015/06/03 |
| Publishing Institution: | Universitätsbibliothek Johann Christian Senckenberg |
| Release Date: | 2024/02/19 |
| Tag: | focused-electron-beam-induced deposition (FEBID); Monte Carlo simulation of electron transport; surface excitations; secondary-electron emission |
| Volume: | 6 |
| Page Number: | 8 |
| First Page: | 1260 |
| Last Page: | 1267 |
| Institutes: | Physik / Physik |
| Dewey Decimal Classification: | 5 Naturwissenschaften und Mathematik / 53 Physik / 530 Physik |
| Sammlungen: | Universitätspublikationen |
| Licence (German): |  Creative Commons - Namensnennung 2.0 |
