Focused particle beam-induced processing
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| Author: | Michael HuthORCiDGND, Armin Gölzhäuser |
|---|---|
| URN: | urn:nbn:de:hebis:30:3-575347 |
| DOI: | https://doi.org/10.3762/bjnano.6.191 |
| ISSN: | 2190-4286 |
| Parent Title (German): | Beilstein Journal of Nanotechnology |
| Publisher: | Beilstein-Institut |
| Place of publication: | Frankfurt am Main |
| Document Type: | Article |
| Language: | English |
| Date of Publication (online): | 2015/09/09 |
| Date of first Publication: | 2015/09/09 |
| Publishing Institution: | Universitätsbibliothek Johann Christian Senckenberg |
| Release Date: | 2021/01/06 |
| Volume: | 6 |
| Issue: | 1 |
| Page Number: | 3 |
| First Page: | 1883 |
| Last Page: | 1885 |
| HeBIS-PPN: | 476112095 |
| Institutes: | Physik / Physik |
| Dewey Decimal Classification: | 5 Naturwissenschaften und Mathematik / 53 Physik / 530 Physik |
| Sammlungen: | Universitätspublikationen |
| Licence (German): |  Creative Commons - Namensnennung 2.0 |
