81.65.-b Surface treatments (see also 85.40.-e Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology)
- 81.65.Cf Surface cleaning, etching, patterning (see also 52.77.Bn Etching and cleaning in physics of plasmas)
- 81.65.Kn Corrosion protection (see also 82.45.Bb Corrosion and passivation in electrochemistry)
- 81.65.Lp Surface hardening: nitridation, carburization, carbonitridation
- 81.65.Mq Oxidation
- 81.65.Ps Polishing, grinding, surface finishing
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81.65.Rv Passivation (see also 82.45.Bb Corrosion and passivation in electrochemistry)
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- 81.65.Tx Gettering