@phdthesis{Brunkahl2011,
  author      = {Oliver Brunkahl},
  title       = {Pr{\"a}paration von Oxynitrid-D{\"u}nnfilmen des Niobs durch Rapid Thermal Processing (RTP)},
  type        = {doctoralthesis},
  school      = {Universit{\"a}tsbibliothek Johann Christian Senckenberg},
  year        = {2011},
}