@phdthesis{Possner2011,
  author      = {Daniel Georg Possner},
  title       = {Organic peracid etches : a new class of chromium-free etching solutions for the delineation of defects in thin silicon films},
  type        = {doctoralthesis},
  school      = {Universit{\"a}tsbibliothek Johann Christian Senckenberg},
  year        = {2011},
}