@article{KellerHuth2018,
  author    = {Lukas Keller and Michael Huth},
  title     = {Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition},
  journal   = {Beilstein journal of nanotechnology},
  volume    = {9},
  pages     = {2581 -- 2598},
  doi       = {10.3762/bjnano.9.240},
  year      = {2018},
}