TY  - JOUR
A1  - Jungwirth, Felix
A1  - Knez, Daniel
A1  - Porrati, Fabrizio
A1  - Schuck, Alfons G.
A1  - Huth, Michael
A1  - Plank, Harald
A1  - Barth, Sven
T1  - Vanadium and Manganese Carbonyls as Precursors in Electron-Induced and Thermal Deposition Processes
T2  - Nanomaterials
N2  - The material composition and electrical properties of nanostructures obtained from focused electron beam-induced deposition (FEBID) using manganese and vanadium carbonyl precursors have been investigated. The composition of the FEBID deposits has been compared with thin films derived by the thermal decomposition of the same precursors in chemical vapor deposition (CVD). FEBID of V(CO)6 gives access to a material with a V/C ratio of 0.63–0.86, while in CVD a lower carbon content with V/C ratios of 1.1–1.3 is obtained. Microstructural characterization reveals for V-based materials derived from both deposition techniques crystallites of a cubic phase that can be associated with VC1−xOx. In addition, the electrical transport measurements of direct-write VC1−xOx show moderate resistivity values of 0.8–1.2 × 103 µΩ·cm, a negligible influence of contact resistances and signatures of a granular metal in the temperature-dependent conductivity. Mn-based deposits obtained from Mn2(CO)10 contain ~40 at% Mn for FEBID and a slightly higher metal percentage for CVD. Exclusively insulating material has been observed in FEBID deposits as deduced from electrical conductivity measurements. In addition, strong tendencies for postgrowth oxidation have to be considered.
KW  - FEBID
KW  - metal carbonyl
KW  - vanadium
KW  - manganese
KW  - electrical transport characteristics
KW  - CVD
Y1  - 2022
UR  - http://publikationen.ub.uni-frankfurt.de/frontdoor/index/index/docId/69269
UR  - https://nbn-resolving.org/urn:nbn:de:hebis:30:3-692692
SN  - 2079-4991
N1  - This research was funded by the Deutsche Forschungsgemeinschaft (DFG), grant numbers BA 6595/1-1 (413940754), BA 6595/2-1 (413942347), and HU 752/16-1. D.K. acknowledges funding from the European Union’s Horizon 2020 research and innovation program under grant agreement no. 823717-ESTEEM3.
VL  - 12
IS  - 7, 1110
SP  - 1
EP  - 16
PB  - MDPI
CY  - Basel
ER  -