TY  - JOUR
A1  - Keller, Lukas
A1  - Huth, Michael
T1  - Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition
T2  - Beilstein journal of nanotechnology
N2  - Fabrication of three-dimensional (3D) nanoarchitectures by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics and plasmonics. However, the generation of suitable pattern files that control the electron beam’s movement, and thereby reliably map the desired target 3D structure from a purely geometrical description to a shape-conforming 3D deposit, is nontrivial. To address this issue we developed several writing strategies and associated algorithms implemented in C++. Our pattern file generator handles different proximity effects and corrects for height-dependent precursor coverage. Several examples of successful 3D nanoarchitectures using different precursors are presented that validate the effectiveness of the implementation.
KW  - focused electron beam induced deposition
KW  - nanofabrication
KW  - three-dimensional nanostructures
Y1  - 2018
UR  - http://publikationen.ub.uni-frankfurt.de/frontdoor/index/index/docId/47531
UR  - https://nbn-resolving.org/urn:nbn:de:hebis:30:3-475319
SN  - 2190-4286
N1  - License and Terms: This is an Open Access article under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0). Please note that the reuse, redistribution and reproduction in particular requires that the authors and source are credited.
VL  - 9
SP  - 2581
EP  - 2598
PB  - Beilstein-Institut zur Förderung der Chemischen Wissenschaften
CY  - Frankfurt, M.
ER  -