TY  - JOUR
A1  - Sachser, Roland
A1  - Hütner, Johanna
A1  - Schwalb, Christian H.
A1  - Huth, Michael
T1  - Granular Hall sensors for scanning probe microscopy
T2  - Nanomaterials
N2  - Scanning Hall probe microscopy is attractive for minimally invasive characterization of magnetic thin films and nanostructures by measurement of the emanating magnetic stray field. Established sensor probes operating at room temperature employ highly miniaturized spin-valve elements or semimetals, such as Bi. As the sensor layer structures are fabricated by patterning of planar thin films, their adaption to custom-made sensor probe geometries is highly challenging or impossible. Here we show how nanogranular ferromagnetic Hall devices fabricated by the direct-write method of focused electron beam induced deposition (FEBID) can be tailor-made for any given probe geometry. Furthermore, we demonstrate how the magnetic stray field sensitivity can be optimized in situ directly after direct-write nanofabrication of the sensor element. First proof-of-principle results on the use of this novel scanning Hall sensor are shown.
KW  - focused electron beam induced deposition
KW  - granular ferromagnets
KW  - scanning Hall probe microscopy
Y1  - 2021
UR  - http://publikationen.ub.uni-frankfurt.de/frontdoor/index/index/docId/57654
UR  - https://nbn-resolving.org/urn:nbn:de:hebis:30:3-576544
SN  - 2079-4991
VL  - 11
IS  - Article 348
PB  - MDPI
CY  - Basel
ER  -