TY  - JOUR
A1  - Plank, Harald
A1  - Winkler, Robert
A1  - Schwalb, Christian H.
A1  - Hütner, Johanna
A1  - Fowlkes, Jason D.
A1  - Rack, Philip D.
A1  - Utke, Ivo
A1  - Huth, Michael
T1  - Focused electron beam-based 3D nanoprinting for scanning probe microscopy: a review
T2  - Micromachines
N2  - Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morphology mapping, new challenges have emerged regarding the design, morphology, function, and reliability of nano-probes. To tackle these challenges, versatile fabrication methods for precise nano-fabrication are needed. Aside from well-established technologies for SPM nano-probe fabrication, focused electron beam-induced deposition (FEBID) has become increasingly relevant in recent years, with the demonstration of controlled 3D nanoscale deposition and tailored deposit chemistry. Moreover, FEBID is compatible with practically any given surface morphology. In this review article, we introduce the technology, with a focus on the most relevant demands (shapes, feature size, materials and functionalities, substrate demands, and scalability), discuss the opportunities and challenges, and rationalize how those can be useful for advanced SPM applications. As will be shown, FEBID is an ideal tool for fabrication/modification and rapid prototyping of SPM-tipswith the potential to scale up industrially relevant manufacturing.
KW  - scanning probe microscopy
KW  - atomic force microscopy
KW  - tip fabrication
KW  - nano-printing
KW  - focused electron beam-induced deposition
KW  - 3D printing
KW  - nano-fabrication
KW  - additive manufacturing
Y1  - 2019
UR  - http://publikationen.ub.uni-frankfurt.de/frontdoor/index/index/docId/52748
UR  - https://nbn-resolving.org/urn:nbn:de:hebis:30:3-527482
SN  - 2072-666X
N1  - This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited
VL  - 11
IS  - 1, Art. 48
SP  - 1
EP  - 31
PB  - MDPI
CY  - Basel
ER  -