@phdthesis{Kaempken2015,
  author      = {Britta K{\"a}mpken},
  title       = {Untersuchungen zur Herstellung h{\"o}herer Silane f{\"u}r die Si-CVD},
  type        = {doctoralthesis},
  pages       = {II, 147},
  school      = {Universit{\"a}tsbibliothek Johann Christian Senckenberg},
  year        = {2015},
}