TY  - JOUR
A1  - Huth, Michael
A1  - Porrati, Fabrizio
A1  - Gruszka, Peter
A1  - Barth, Sven
T1  - Temperature-dependent growth characteristics of nb- and cofe-based nanostructures by direct-write using focused electron beam-induced deposition
T2  - Micromachines
N2  - Focused electron and ion beam-induced deposition (FEBID/FIBID) are direct-write techniques with particular advantages in three-dimensional (3D) fabrication of ferromagnetic or superconducting nanostructures. Recently, two novel precursors, HCo 3 Fe(CO) 12 and Nb(NMe 3 ) 2 (N-t-Bu), were introduced, resulting in fully metallic CoFe ferromagnetic alloys by FEBID and superconducting NbC by FIBID, respectively. In order to properly define the writing strategy for the fabrication of 3D structures using these precursors, their temperature-dependent average residence time on the substrate and growing deposit needs to be known. This is a prerequisite for employing the simulation-guided 3D computer aided design (CAD) approach to FEBID/FIBID, which was introduced recently. We fabricated a series of rectangular-shaped deposits by FEBID at different substrate temperatures between 5 ∘ C and 24 ∘ C using the precursors and extracted the activation energy for precursor desorption and the pre-exponential factor from the measured heights of the deposits using the continuum growth model of FEBID based on the reaction-diffusion equation for the adsorbed precursor.
KW  - focused electron beam induced deposition
KW  - precursor residence time
KW  - continuum model
Y1  - 2019
UR  - http://publikationen.ub.uni-frankfurt.de/frontdoor/index/index/docId/52764
UR  - https://nbn-resolving.org/urn:nbn:de:hebis:30:3-527649
SN  - 2072-666X
N1  - This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited
VL  - 11
IS  - 1, Art. 28
SP  - 1
EP  - 9
PB  - MDPI
CY  - Basel
ER  -