@article{PlankWinklerSchwalbetal.2019, author = {Harald Plank and Robert Winkler and Christian H. Schwalb and Johanna H{\"u}tner and Jason D. Fowlkes and Philip D. Rack and Ivo Utke and Michael Huth}, title = {Focused electron beam-based 3D nanoprinting for scanning probe microscopy: a review}, journal = {Micromachines}, volume = {11}, number = {1, Art. 48}, pages = {1 -- 31}, doi = {10.3390/mi11010048}, year = {2019}, }