@phdthesis{Guder2010,
  author      = {Mathias Guder},
  title       = {Photo-resist stripping with DI/O3 in semiconductor device manufacturing : process chemistry and analytical aspects},
  type        = {doctoralthesis},
  school      = {Universit{\"a}tsbibliothek Johann Christian Senckenberg},
  year        = {2010},
}