@phdthesis{Maehliss2008,
  author      = {Jochen Dirk M{\"a}hliß},
  title       = {Development of chromium(VI)-free defect etching solutions for application on silicon substrates},
  type        = {doctoralthesis},
  pages       = {255},
  school      = {Universit{\"a}tsbibliothek Johann Christian Senckenberg},
  year        = {2008},
}