TY  - JOUR
A1  - Salvat-Pujol, Francesc
A1  - Valentí, Roser
A1  - Werner, Wolfgang S. M.
T1  - Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments
T2  - Beilstein journal of nanotechnology
N2  - The aim of the present overview article is to raise awareness of an essential aspect that is usually not accounted for in the modelling of electron transport for focused-electron-beam-induced deposition (FEBID) of nanostructures: Surface excitations are on the one hand responsible for a sizeable fraction of the intensity in reflection-electron-energy-loss spectra for primary electron energies of up to a few kiloelectronvolts and, on the other hand, they play a key role in the emission of secondary electrons from solids, regardless of the primary energy. In this overview work we present a general perspective of recent works on the subject of surface excitations and on low-energy electron transport, highlighting the most relevant aspects for the modelling of electron transport in FEBID simulations.
KW  - focused-electron-beam-induced deposition (FEBID); Monte Carlo simulation of electron transport; surface excitations; secondary-electron emission
Y1  - 2015
UR  - http://publikationen.ub.uni-frankfurt.de/frontdoor/index/index/docId/82412
UR  - https://nbn-resolving.org/urn:nbn:de:hebis:30:3-824128
SN  - 2190-4286
VL  - 6
SP  - 1260
EP  - 1267
PB  - Beilstein-Institut zur Förderung der Chemischen Wissenschaften
CY  - Frankfurt am Main
ER  -