@article{HuthGoelzhaeuser2015,
  author    = {Michael Huth and Armin G{\"o}lzh{\"a}user},
  title     = {Focused particle beam-induced processing},
  journal   = {Beilstein Journal of Nanotechnology},
  volume    = {6},
  number    = {1},
  pages     = {1883 -- 1885},
  doi       = {10.3762/bjnano.6.191},
  year      = {2015},
}