TY  - JOUR
A1  - Huth, Michael
A1  - Gölzhäuser, Armin
T1  - Focused particle beam-induced processing
T2  - Beilstein Journal of Nanotechnology
Y1  - 2015
UR  - http://publikationen.ub.uni-frankfurt.de/frontdoor/index/index/docId/57534
UR  - https://nbn-resolving.org/urn:nbn:de:hebis:30:3-575347
SN  - 2190-4286
VL  - 6
IS  - 1
SP  - 1883
EP  - 1885
PB  - Beilstein-Institut
CY  - Frankfurt am Main
ER  -