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Towards a THz Bloch laser
(2011)
The realisation of tunable THz laser sources working at room temperature would give
rise to further applications in this range of the electromagnetic spectrum. The THz
Bloch laser could therefore become the basis for a technological breakthrough. Beside
this practical relevance, the physics of the gain mechanism has been investigated
theoretically for a long time and the experimental implementation of a self-starting
laser still has not been achieved.
At the beginning of this thesis the basic principles of Bloch oscillations and the
related Bloch gain are described. The need of a superlattice structure to make Bloch
oscillations possible in a semiconductor material is discussed. In this context, the effect
of negative differential resistance and its influence on the field distribution due to Gunn
domains is explained. The latter lead to an inhomogeneous field which may suppress
the Bloch gain mechanism. The Krömer criterion is introduced and the concept of
field-pinning layers to improve the field homogeneity is deduced. Finally, the design of
the laser material is shown and different types of laser waveguides are compared.
In chapter 3 detailed recipes for the processing of samples are given. Different types of
contacts (ohmic and Schottky), the wafer bonding process required for double-metal
lasers and the application of different photoresists for different purposes are described.
An explanation of the formation of waveguides due to dry etching, wet etching
and ion implantation follows. Dry etching is an established technique in the field
of microstructure processing but the challenge of etching about 20 μm has led to
problems. The high etching depth also makes wet etching difficult but this method
could be improved due to a hard bake of the photoresist. The protection of critical
areas on the surface of the samples with photoresist during ion implantation was
increased by optimising the spin coating process. However, a full implantation of the
active layer between the waveguides was not achieved which was the reason for the
development of the hybrid technology. Here a prior wet etching of about 10 μm is
performed and the rest of the material is implanted.
The experimental setup is shown in chapter 4. An alternative method for the electrical
contacting with the help of a copper bar is introduced. This improves the current
distribution and the risk of an electrical breakdown during the measurements could
therefore be lowered. Devices for THz beam guidance and spectroscopic measurements
are shown and the method of biasing the samples with pulses below 100 ns and
determining the effective voltage applied to the sample is depicted. These short pulses
are required to prevent the samples heating up drastically due to high power.
Chapter 5 contains the current-voltage characterisation of several structures including
I-V-samples, Bloch laser samples and a quantum cascade laser. Different contacts
(ohmic and Schottky) and different techniques for the formation of the ridges have
been used in the processing of these samples (performed at the University of Frankfurt
in all cases) and their influence on the I-V-dependence is discussed. The properties of
the THz emission of the quantum cascade laser are in good agreement with published
results from lasers processed with the same material. Another important result of
this chapter is that the Bloch laser samples show unstable behaviour compared to the
quantum cascade structure even with short pulses (of about 10 ns) where the risk of an
electrical breakdown or the building of filaments is low. THz radiation emitted from
one of the Bloch laser samples could not be observed.
Two aspects that may have prevented the Bloch laser to emit are discussed in
chapter 6. The saturation of the gain for higher amplitudes of the THz wave is
investigated in single mode and multiple mode operation (the latter could occur due
to the Bloch gain being expected to be broadband). In both cases it is shown that
the saturation effect would limit the output power only to values clearly above the
detection limit. In the subsequent section the distribution of the electric field is
simulated with SILVACO software. Structures with transit layer lengths above the
Krömer criterion are compared with structures which include field-pinning layers. It is
shown that the latter are useful to avoid propagating Gunn domains as they build up
in similar structures without field-pinning layers. Nevertheless, the electric field inside
the superlattice regions is not stable. Beside spatial inhomogeneities also temporal
variations of the field magnitude are observed. The lack of a suitable field distribution
is expected to be the main reason for the samples not to work.