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Focused ion beam induced deposition (FIBID) is a direct-write technique enabling the growth of individual nanostructures of any shape and dimension with high lateral resolution. Moreover, the fast and reliable writing of periodically arranged nanostructures can be used to fabricate devices for the investigation of collective phenomena and to design novel functional metamaterials. Here, FIBID is employed to prepare dc-Josephson junction arrays (dc-JJA) consisting of superconducting NbC dots coupled through the proximity effect via a granular metal layer. The fabrication is straightforward and allows the preparation of dc-JJA within a few seconds. Microstructure and composition of the arrays are investigated by transmission electron microscopy and energy dispersive X-ray spectroscopy. The superconductor-to-metal transition of the prepared dc-JJA is studied in a direct way, by tuning the Josephson junction resistance in 70 nm-spaced superconducting NbC dots. The observed magnetoresistance oscillations with a period determined by the flux quantum give evidence for the coherent charge transport by paired electrons. Moreover, the measured resistance minima correspond to two fundamental matching configurations of fluxons in the dc-JJA, caused by magnetic frustration. The robust properties of the prepared dc-JJA demonstrate the opportunities for a fast preparation of complex device configurations using direct-write approaches.
Vanadium and Manganese Carbonyls as Precursors in Electron-Induced and Thermal Deposition Processes
(2022)
The material composition and electrical properties of nanostructures obtained from focused electron beam-induced deposition (FEBID) using manganese and vanadium carbonyl precursors have been investigated. The composition of the FEBID deposits has been compared with thin films derived by the thermal decomposition of the same precursors in chemical vapor deposition (CVD). FEBID of V(CO)6 gives access to a material with a V/C ratio of 0.63–0.86, while in CVD a lower carbon content with V/C ratios of 1.1–1.3 is obtained. Microstructural characterization reveals for V-based materials derived from both deposition techniques crystallites of a cubic phase that can be associated with VC1−xOx. In addition, the electrical transport measurements of direct-write VC1−xOx show moderate resistivity values of 0.8–1.2 × 103 µΩ·cm, a negligible influence of contact resistances and signatures of a granular metal in the temperature-dependent conductivity. Mn-based deposits obtained from Mn2(CO)10 contain ~40 at% Mn for FEBID and a slightly higher metal percentage for CVD. Exclusively insulating material has been observed in FEBID deposits as deduced from electrical conductivity measurements. In addition, strong tendencies for postgrowth oxidation have to be considered.
Focused electron and ion beam induced deposition (FEBID/FIBID) methods have gained significant attention in recent years because of their unique ability for the maskless fabrication of arbitrary three-dimensional shapes. Both techniques enable material deposition down to the nanoscale for applications in materials science and condensed matter physics. However, the number of suitable precursor molecules, especially for high purity deposits, is usually still very limited to date. Additionally, both the FEBID and FIBID process are very complex when assessed in detailed and the development of process-optimize, tailored precursor molecules is not yet possible.
In the first part of this work hexacarbonyl vanadium (V(CO)6) and dimanganese decacarbonyl (Mn2(CO)10) are investigated for their use in FEBID in order to complement the already existing data on transition metal carbonyl precursors. In addition, chemical vapor deposition (CVD) has been carried out to compare compositional differences for electron induced and purely thermal processes. FEBID using V(CO)6 resulted in the formation of a vanadium (oxy)carbide material with a V:C ratio of approx. 0.6-0.9. The material shows a temperature-dependent normalized electrical conductance typical for granular metals in agreement with TEM analysis. Additionally, characterization of the crystalline fractions reveals a cubic VC1-xOx phase in agreement with the phase observed in CVD thin films. Thermal decomposition using CVD yielded material of higher purity with V:C ratios of 1.1-1.3. In contrast, an insulating material with approx. 40 at% Mn is obtained for FEBID using Mn2(CO)10 as precursor with very similar compositions being observed for CVD thin films.
The second part of this work deals with the deposition of defined alloy materials by focused charged particle beam deposition. Three silyl substituted transition metal carbonyl complexes have been synthesized and tested for FEBID, FIBID and CVD. The three precursors investigated were: H3SiMn(CO)5, H3SiCo(CO)4, and H2Si(Co(CO)4)2. FEBID experiments with the manganese derivative show the selective loss of silicon, and metal/metalloid contents of up to 49 at%. Contrary, material derived from both cobalt derivatives did retain the 1:1 and 2:1 Co:Si ratios respectively, resulting in metal/metalloid contents of up to 62 at%. Temperature-dependent normalized electrical conductance measurements of as-grown and post-growth electron beam irradiated samples reveal behavior typical for granular metals except for the as-grown CoSi material which is located on the insulating side of the metal-insulator transition. Ga+-FIBID revealed H2Si(Co(CO)4)2 to be a very suitable precursor, retaining the predefined Co:Si ratio in the deposits, while significant loss of silicon was observed for H3SiCo(CO)4 derived deposits. Contrary to FEBID high metal/metalloid contents of up to 90 at% are obtained. Additionally, temperature dependent electrical properties of dicobalt silicide and the expected ferromagnetic behavior have been observed for the Co2Si-FIBID material. Further analysis enables the proposition of different dominating decomposition channels in FEBID and FIBID based on microstructural features such as bubble formation in FIBID materials.
Kinesins play an important role in many physiological functions including intracellular vesicle transport and mitosis. The emerging role of kinesins in different cancers led us to investigate the expression and functional role of kinesins in meningioma. Therefore, we re-analyzed our previous microarray dataset of benign, atypical, and anaplastic meningiomas (n = 62) and got evidence for differential expression of five kinesins (KIFC1, KIF4A, KIF11, KIF14 and KIF20A). Further validation in an extended study sample (n = 208) revealed a significant upregulation of these genes in WHO°I to °III meningiomas (WHO°I n = 61, WHO°II n = 88, and WHO°III n = 59), which was most pronounced in clinically more aggressive tumors of the same WHO grade. Immunohistochemical staining confirmed a WHO grade-associated upregulated protein expression in meningioma tissues. Furthermore, high mRNA expression levels of KIFC1, KIF11, KIF14 and KIF20A were associated with shorter progression-free survival. On a functional level, knockdown of kinesins in Ben-Men-1 cells and in the newly established anaplastic meningioma cell line NCH93 resulted in a significantly inhibited tumor cell proliferation upon siRNA-mediated downregulation of KIF11 in both cell lines by up to 95% and 71%, respectively. Taken together, in this study we were able to identify the prognostic and functional role of several kinesin family members of which KIF11 exhibits the most promising properties as a novel prognostic marker and therapeutic target, which may offer new treatment options for aggressive meningiomas.