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In the production of integrated circuits (ICs), photolithography plays a key role in wafer structuring. The basic principle of photolithography is the selective processing of areas (etching, implantation, metallisation etc.) while the others are covered and therefore protected by the resist. After each process step the resist, now modified, has to be removed. In the history of semiconductor manufacturing this has been accomplished with a mixture of H2SO4 and H2O2, H2SO4 and O3 or a plasma etch. As the structure sizes decreased they reached a stage where they had to be exposed to light of shorter wavelengths for the photolithography, going from i-line (365 nm) to DUV (248 nm and 193 nm). This change in wavelength now requires new resists and therewith new stripping methods. Beside the changes in the resist the finer structures are also more sensitive to damages caused by the resist strip. Along with this the demand for cost reduction and environment-friendliness poses a big challenge for modern resist stripping. In this study ozone in deionised water (DI/O3) was the basic chemistry investigated as it is cost efficient in production and disposal as well as environment friendly. Furthermore it is a chemistry known to cause no damage to the wafers. DI/O3 has been successfully applied to strip i-line resists. The challenge now is to find ways and means to make DI/O3 strip even highly implanted DUV resists which currently can only be removed by a plasma etch. To achieve this a detailed understanding of the behaviour of ozone in DI water and the influence of factors both chemical and physical on the stripping efficiency at the different stages in the process is necessary. Along with this, methods which enable the elucidation of resist structures and the changes they undergo during the process of photolithography as well as during the ozone strip have to be developed. This will enable us to understand the mechanisms involved and hence, ideally, develop ozone-based stripping solutions customized for each resist and process step. For this purpose the ozone decomposition in DI water with and without additives was studied via UV-Vis spectroscopy. Radicals generated within the ozone decomposition were trapped and quantified, the resists were studied directly on the wafer with IR and Raman spectroscopy and stripped with DI/O3-mixtures and different setups to find optimum conditions for a complete and damage free resist strip. UV-Vis spectroscopy at 260 nm was used to study ozone decomposition and the factors, both chemical and physical, which influence it. These factors are pH, different additives at the same pH, temperature and mixing of the solution. For the radical determination trapping reactions with MeOH and DMSO both forming CH2O which is further converted to DDL as the detectable species were compared with a variation of the classical iodometric titration acting as an absolute method without the need of calibration. IR spectroscopy proved to be a suitable method for the structural characterisation of the resists and the tracking of the changes undergone during the various processing steps as well as the ozone based stripping. For the stripping with DI/O3 IR spectroscopy delivered well-defined spectra. These displayed significant peak changes which support the assumption of classical ozonolysis as the decomposition mechanism for the unimplanted resist. For the study of the resist crust originating from ion implantation IR was fundamentally unsuitable and was replaced by Raman spectroscopy and microscopy. Raman spectra showed the crust to be of a highly carbon containing structure. Regrettably, the peak assignable to the crust was too broad for the exact composition of the crust to be determined. The wavelength region of the peak corresponds to that of peaks of glassy carbon and highly ordered and conventional graphite. Such a broad peak suggests that the structure of the crust is not uniform but contains more than one carbon modification. As the purpose of all these studies is to enable or improve DI/O3 based resist stripping on unimplanted as well as high-dose implanted resists the removal efficiency of DI/O3 spiked with different additives that alter the pH was studied. For these unimplanted resists the maximum efficiency could be achieved at pH = 5 – 7. Lowering or increasing the pH beyond this range gave poor results. The stripping of highly implanted resists could be achieved only at harsh conditions with a high pH-level of 12 - 13 with a narrow process window showing no stripping at lower pHs and severe damages at higher levels. The principle application of DI/O3 stripping chemistry could be proved but the currently required process time unfortunatelly is too long for commercial application and needs further optimisation.
This study addresses the structure-function relationships of three essential membrane proteins: Porin from Paracoccus denitrificans, Porin OmpG from Eschericia coli and BetP from Corynobacterium glutamicum using Fourier transform infrared (FT-IR) spectroscopy and Attenuated Total Reflection (ATR) techniques. The structure of porin from P. denitrificans is known for more than a decade; however, the mechanism for loss of functionality together with the monomerization was not clear. In this study we have addressed the role of lipids for the functionality of porin using FT-IR. OmpF porin was found to interact with the lipid molecules via the aromatic girdles surrounding the protein for functionality. In this study, molecular bonds and groups of the lipids were established as reporter groups probing at different depths of the bilayer in order to understand the interaction partner of the aromatic girdles of porins. Monomerization of the trimeric assembly of OmpF porin reconstituted in lipids is induced by increasing the temperature. Porin (OmpF) was found to be extremely stable: The secondary structure of the protein was unaltered up to the temperature-induced main transition, around 80-90 °C, above which it is denatured. However, the interaction of the aromatic girdle with the lipid molecules exhibited distinct changes at much lower temperature values (40 - 50°) where, according to the previous functional studies, monomerization and the loss of function occurs. The results are compared with OmpG porin from E.coli, for which the functional unit is a monomer. The aromatic girdle-lipid interaction was monitored by the tyrosine aromatic ring C=C vibrational mode, a universal marker for the protein stability and interaction. We have also found that the aromatic girdles of porins are interacting with the interfacial region of the lipid bilayer instead of lipid headgroups. Lipid-protein interaction was found to be not only essential for the structural stability, but also for the functionality of OmpF porin. We have also studied the structural properties of OmpG from E.coli. The structure of OmpG at two pH values has been resolved using X-ray crystallography and the channel has been proposed to attain different states at different pH values as closed (pH < 5.5) and open (pH >7.5). This study, using IR spectroscopy, revealed that the pH-induced opening and closing of the channel is reflected by the frequency shifts of the ? sheet structure. OmpG has more rigid ? barrel properties upon opening of the channel. IR spectral analysis revealed multiple ? sheet signals with different hydrogen bond strengths. This enabled us to monitor the formation of hydrogen bridges between the extracellular loops upon opening of the channel. The conclusion that OmpG porin having two states at different pH values was also confirmed by the three mutants where the role of the histidine pair (H231 & H261) and loop 6 has been addressed. Temperature-profiling of the wild type (WT) protein and the mutants did not show pH dependent structural stability differences in detergent solution. However, the WT protein was found to be more stable in the open form in 2D crystals than the closed form. Reconstitution into lipids has increased the transition temperature value by ~20 °C in the closed state and ~25 °C in the open state. Therefore we conclude that the open and closed state of OmpG has structural stability differences that are only revealed in the lipid environment. A comparison of the transition temperature values of OmpG WT and the mutants suggested that the hydrogen bond network among S218-H231-H261-D267, together with the formation of 12 residue-long ?-sheet contributes to the structural stability of the open channel. In the process of closing and opening of the channel, the globular structure of the protein remains mainly unchanged, while there are changes in the side chain moieties. In addition to the role of the histidine pair and the loop L6, in situ opening/closing experiments showed that the negatively charged amino acids, i.e. Asp and Glu, and Arg residues also play an active role; possibly by interacting with each other inside the pore lumen. Therefore it could be concluded that the closure of the channel at acidic pH values is not only via closing the channel entrance by loop 6, but also via changing the electric potential inside the lumen due to the different states of charged amino acids in order to effectively block the gateway. BetP from C.glutamicum attains an active and inactive state in order to adjust its glycine betaine uptake rate to the osmotic conditions that the cell encounters. The structure of BetP is not yet available. The WT protein exhibited structural differences in the presence of excess K+, which is one of the activation conditions. In 2D crystals, increasing the ionic strength to 700 mM K+ was shown to induce changes in the ?-helical moiety with contributions from the ester groups and one Tyr residue using ATR-FTIR. An increase in ionic strength to 220 mM K+ was found to be the threshold value of potassium concentration ([K+]) where the protein exhibits structural alterations in detergent solution. The determined [K+] values are in good agreement with the previous functional studies. However, there are differences in the activation profile of BetP in 2D crystals and in detergent solution, which points out that the lipids are involved in the conformational transition from the inactive to the active state and their absence can lead to different structural properties. BetP WT was found to have ~65% alpha-helix, ~25% random coil and ~10% turn structure in detergent solution. In the presence of excess K+, the WT protein is found to adapt more unordered structure. Secondary structure analysis of the mutants revealed that both the N- and C-terminus are in ?-helical conformation. Reconstitution of WT protein in 2D crystals increased the main transition (denaturation) temperature value from ~62 °C to ~85 °C, a clear indication that the protein is more stable in lipid environment. Temperature-profiling of the two forms of the WT protein revealed that the structural breakdown is preceeded by monomerization of the trimeric assembly. Comparing the two forms of the WT protein and the mutant BetA, we conclude that the oligomeric status is stabilized via the interactions among hydrophilic regions involving the N terminus. H/D exchange and activation with excess K+ in D2O-buffer revealed that activation of the protein involves the interaction of Arg and Asp/Glu residues in the cytoplasmic region of the protein. BetP WT and the two mutants tested, i.e. BetA and BetP?C45, showed differences in protein packing upon activation. The WT protein and BetP?C45 mutant also show changes in the hydrogen bonding properties of turns. Since BetA does not show such a property in activation, we conclude that the N-terminus interacts with the loops in the inactive state via the interaction of charged amino acids for the WT protein and that this interaction is altered during the activation. It could be argued that the protein packing is affected via the changes in turns upon activation. We also have found experimental evidence that one Tyr residue has different orientations in the active and inactive state of BetP. Based on the previous functional studies, it could be one of the five Tyr residues in the cytoplasmic region of the protein (in loop 3, 6, 7 or C-terminus). The mutant BetP?C45, on the other hand, showed fewer differences between the active and inactive state conditions and based on the H/D exchange rates, the mutant shows the properties of an active WT protein, proving that the C-terminal truncation impairs the conformational transition between the active and inactive states.