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Supersurface electron scattering, i.e., electron energy losses and associated deflections in vacuum above the surface of a medium, is shown to contribute significantly to electron spectra. We have obtained experimental verification (in absolute units) of theoretical predictions that the angular distribution of the supersurface backscattering probability exhibits strong oscillations which are anticorrelated with the generalized Ramsauer-Townsend minima in the backscattering probability. We have investigated 500-eV electron backscattering from an Au surface for an incidence angle of 70° and scattering angles between 37° and 165°. After removing the contribution of supersurface scattering from the experimental data, the resulting angular and energy distribution agrees with the Landau-Goudsmit-Saunderson (LGS) theory, which was proposed about 60 years ago, while the raw data are anticorrelated with LGS theory. This result implies that supersurface scattering is an essential phenomenon for quantitative understanding of electron spectra.
The aim of the present overview article is to raise awareness of an essential aspect that is usually not accounted for in the modelling of electron transport for focused-electron-beam-induced deposition (FEBID) of nanostructures: Surface excitations are on the one hand responsible for a sizeable fraction of the intensity in reflection-electron-energy-loss spectra for primary electron energies of up to a few kiloelectronvolts and, on the other hand, they play a key role in the emission of secondary electrons from solids, regardless of the primary energy. In this overview work we present a general perspective of recent works on the subject of surface excitations and on low-energy electron transport, highlighting the most relevant aspects for the modelling of electron transport in FEBID simulations.
We present a numerical investigation of energy and charge distributions during electron-beam-induced growth of tungsten nanostructures on SiO2 substrates by using a Monte Carlo simulation of the electron transport. This study gives a quantitative insight into the deposition of energy and charge in the substrate and in the already existing metallic nanostructures in the presence of the electron beam. We analyze electron trajectories, inelastic mean free paths, and the distribution of backscattered electrons in different compositions and at different depths of the deposit. We find that, while in the early stages of the nanostructure growth a significant fraction of electron trajectories still interacts with the substrate, when the nanostructure becomes thicker the transport takes place almost exclusively in the nanostructure. In particular, a larger deposit density leads to enhanced electron backscattering. This work shows how mesoscopic radiation-transport techniques can contribute to a model that addresses the multi-scale nature of the electron-beam-induced deposition (EBID) process. Furthermore, similar simulations can help to understand the role that is played by backscattered electrons and emitted secondary electrons in the change of structural properties of nanostructured materials during post-growth electron-beam treatments.