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Focused particle beam-induced processing
Author: | Michael HuthORCiDGND, Armin Gölzhäuser |
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URN: | urn:nbn:de:hebis:30:3-575347 |
DOI: | https://doi.org/10.3762/bjnano.6.191 |
ISSN: | 2190-4286 |
Parent Title (German): | Beilstein Journal of Nanotechnology |
Publisher: | Beilstein-Institut |
Place of publication: | Frankfurt am Main |
Document Type: | Article |
Language: | English |
Date of Publication (online): | 2015/09/09 |
Date of first Publication: | 2015/09/09 |
Publishing Institution: | Universitätsbibliothek Johann Christian Senckenberg |
Release Date: | 2021/01/06 |
Volume: | 6 |
Issue: | 1 |
Page Number: | 3 |
First Page: | 1883 |
Last Page: | 1885 |
HeBIS-PPN: | 476112095 |
Institutes: | Physik / Physik |
Dewey Decimal Classification: | 5 Naturwissenschaften und Mathematik / 53 Physik / 530 Physik |
Sammlungen: | Universitätspublikationen |
Licence (German): | Creative Commons - Namensnennung 2.0 |