Focused electron beam-based 3D nanoprinting for scanning probe microscopy: a review
- Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morphology mapping, new challenges have emerged regarding the design, morphology, function, and reliability of nano-probes. To tackle these challenges, versatile fabrication methods for precise nano-fabrication are needed. Aside from well-established technologies for SPM nano-probe fabrication, focused electron beam-induced deposition (FEBID) has become increasingly relevant in recent years, with the demonstration of controlled 3D nanoscale deposition and tailored deposit chemistry. Moreover, FEBID is compatible with practically any given surface morphology. In this review article, we introduce the technology, with a focus on the most relevant demands (shapes, feature size, materials and functionalities, substrate demands, and scalability), discuss the opportunities and challenges, and rationalize how those can be useful for advanced SPM applications. As will be shown, FEBID is an ideal tool for fabrication/modification and rapid prototyping of SPM-tipswith the potential to scale up industrially relevant manufacturing.
Author: | Harald PlankORCiD, Robert WinklerORCiD, Christian H. SchwalbORCiD, Johanna Hütner, Jason D. FowlkesORCiD, Philip D. RackORCiD, Ivo Utke, Michael HuthORCiDGND |
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URN: | urn:nbn:de:hebis:30:3-527482 |
DOI: | https://doi.org/10.3390/mi11010048 |
ISSN: | 2072-666X |
Pubmed Id: | https://pubmed.ncbi.nlm.nih.gov/31906005 |
Parent Title (English): | Micromachines |
Publisher: | MDPI |
Place of publication: | Basel |
Document Type: | Article |
Language: | English |
Year of Completion: | 2019 |
Date of first Publication: | 2019/12/30 |
Publishing Institution: | Universitätsbibliothek Johann Christian Senckenberg |
Release Date: | 2020/02/10 |
Tag: | 3D printing; additive manufacturing; atomic force microscopy; focused electron beam-induced deposition; nano-fabrication; nano-printing; scanning probe microscopy; tip fabrication |
Volume: | 11 |
Issue: | 1, Art. 48 |
Page Number: | 31 |
First Page: | 1 |
Last Page: | 31 |
Note: | This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited |
HeBIS-PPN: | 461423413 |
Institutes: | Physik / Physik |
Dewey Decimal Classification: | 5 Naturwissenschaften und Mathematik / 53 Physik / 530 Physik |
Sammlungen: | Universitätspublikationen |
Licence (German): | Creative Commons - Namensnennung 4.0 |