Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition
- Fabrication of three-dimensional (3D) nanoarchitectures by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics and plasmonics. However, the generation of suitable pattern files that control the electron beam’s movement, and thereby reliably map the desired target 3D structure from a purely geometrical description to a shape-conforming 3D deposit, is nontrivial. To address this issue we developed several writing strategies and associated algorithms implemented in C++. Our pattern file generator handles different proximity effects and corrects for height-dependent precursor coverage. Several examples of successful 3D nanoarchitectures using different precursors are presented that validate the effectiveness of the implementation.
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| Author: | Lukas Keller, Michael HuthORCiDGND |
|---|---|
| URN: | urn:nbn:de:hebis:30:3-475319 |
| DOI: | https://doi.org/10.3762/bjnano.9.240 |
| ISSN: | 2190-4286 |
| Pubmed Id: | https://pubmed.ncbi.nlm.nih.gov/30345218 |
| Parent Title (English): | Beilstein journal of nanotechnology |
| Publisher: | Beilstein-Institut zur Förderung der Chemischen Wissenschaften |
| Place of publication: | Frankfurt, M. |
| Contributor(s): | Armin Gölzhäuser |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2018 |
| Date of first Publication: | 2018/09/27 |
| Publishing Institution: | Universitätsbibliothek Johann Christian Senckenberg |
| Release Date: | 2018/11/20 |
| Tag: | focused electron beam induced deposition; nanofabrication; three-dimensional nanostructures |
| Volume: | 9 |
| Page Number: | 18 |
| First Page: | 2581 |
| Last Page: | 2598 |
| Note: | License and Terms: This is an Open Access article under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0). Please note that the reuse, redistribution and reproduction in particular requires that the authors and source are credited. |
| HeBIS-PPN: | 440091519 |
| Institutes: | Physik / Physik |
| Dewey Decimal Classification: | 5 Naturwissenschaften und Mathematik / 53 Physik / 530 Physik |
| Sammlungen: | Universitätspublikationen |
| Licence (German): |  Creative Commons - Namensnennung 4.0 |
