Vanadium and Manganese Carbonyls as Precursors in Electron-Induced and Thermal Deposition Processes

  • The material composition and electrical properties of nanostructures obtained from focused electron beam-induced deposition (FEBID) using manganese and vanadium carbonyl precursors have been investigated. The composition of the FEBID deposits has been compared with thin films derived by the thermal decomposition of the same precursors in chemical vapor deposition (CVD). FEBID of V(CO)6 gives access to a material with a V/C ratio of 0.63–0.86, while in CVD a lower carbon content with V/C ratios of 1.1–1.3 is obtained. Microstructural characterization reveals for V-based materials derived from both deposition techniques crystallites of a cubic phase that can be associated with VC1−xOx. In addition, the electrical transport measurements of direct-write VC1−xOx show moderate resistivity values of 0.8–1.2 × 103 µΩ·cm, a negligible influence of contact resistances and signatures of a granular metal in the temperature-dependent conductivity. Mn-based deposits obtained from Mn2(CO)10 contain ~40 at% Mn for FEBID and a slightly higher metal percentage for CVD. Exclusively insulating material has been observed in FEBID deposits as deduced from electrical conductivity measurements. In addition, strong tendencies for postgrowth oxidation have to be considered.
Author:Felix JungwirthORCiDGND, Daniel KnezORCiDGND, Fabrizio Porrati, Alfons G. SchuckORCiD, Michael HuthORCiDGND, Harald PlankORCiD, Sven BarthORCiDGND
Parent Title (English):Nanomaterials
Place of publication:Basel
Document Type:Article
Date of Publication (online):2022/03/28
Date of first Publication:2022/03/28
Publishing Institution:Universitätsbibliothek Johann Christian Senckenberg
Release Date:2023/11/21
Tag:CVD; FEBID; electrical transport characteristics; manganese; metal carbonyl; vanadium
Issue:7, 1110
Article Number:1110
Page Number:16
First Page:1
Last Page:16
This research was funded by the Deutsche Forschungsgemeinschaft (DFG), grant numbers BA 6595/1-1 (413940754), BA 6595/2-1 (413942347), and HU 752/16-1. D.K. acknowledges funding from the European Union’s Horizon 2020 research and innovation program under grant agreement no. 823717-ESTEEM3.
Dewey Decimal Classification:5 Naturwissenschaften und Mathematik / 53 Physik / 530 Physik
5 Naturwissenschaften und Mathematik / 54 Chemie / 540 Chemie und zugeordnete Wissenschaften
Licence (German):License LogoCreative Commons - Namensnennung 4.0